Site-Selective Deposition of Silver Nanoparticles Using Modifi ed Silver Mirror Reaction and Surface Modifi cation by Self-Assembled Monolayer

We developed a set of processes for depositing silver nanoparticles on a glass substrate that involves using a modifi ed silver mirror reaction, whereby dispersants are added to a conventional silver mirror solution. The whole set of processes was completed in 15 min in a nonvacuum environment, except the cleaning processes with oxygen plasma at 20 Pa, and at a low cost. The processes can be applied to the siteselective deposition of silver nanoparticles by modifying the surface characteristics of glass substrates using a self-assembled monolayer (SAM). We used a microcontact printing method that incorporated a non-photolithographic top-down process to pattern a SAM. The proposed processes are readily applicable to promising applications of metal nanoparticles, such as ultrasensitive sensors and catalysts.